Call Number (LC) Title Results
TK7875 .E53 2004 Enabling technology for MEMS and nanodevices / 1
TK7875 .E53 2004eb Enabling technology for MEMS and nanodevices / 1
TK7875 .E73 2021eb 3D and circuit integration of MEMS / 1
TK7875 .F73 2004 Introduction to microfabrication / 1
TK7875 .F73 2010eb Introduction to microfabrication / 2
TK7875 .F86 2001 Functional integration of opto-electro-mechanical devices and systems : 24-25 January 2001, San Jose, USA /
Functional integration of opto-electro-mechanical devices and systems 24-25 January 2001, San Jose, USA / 		2
TK7875 .F86 2002 Functional integration of opto-electro-mechanical devices and systems II : 23-24 January 2002, San Jose, USA /
Functional integration of opto-electro-mechanical devices and systems II 23-24 January 2002, San Jose, USA / 		2
TK7875 .F86 2004 Functional micro- and nanosystems : proceedings of the 4th caesarium, Bonn, June 16-18, 2003 / 1
TK7875 .F87 2002 Functional integration of opto-electro-mechanical devices and systems II : 23-24 January 2002, San Jose, USA / 1
TK7875 .F89 2004 Functional micro- and nanosystems : proceedings of the 4th caesarium, Bonn, June 16-18, 2003 / 1
TK7875 .G37 2001 Microsensors, MEMS, and smart devices / 1
TK7875 .G37 2001eb Microsensors, MEMS, and smart devices 1
TK7875 .G37 2015eb Micro and nano fabrication : tools and processes / 1
TK7875 .G38 2006 Smart mems and sensor systems / 1
TK7875 .G38 2006eb Smart mems and sensor systems / 2
TK7875 .G43 2010 Lab-on-a-chip techniques, circuits, and biomedical applications /
Lab-on-a-chip : techniques, circuits, and biomedical applications / 		3
TK7875 .G46 2015eb Introduction to micromechanisms and microactuators / 1
TK7875 .G4613 2008 Introduction to microsystem technology : a guide for students / 1
TK7875 .G4613 2008eb Introduction to microsystem technology : a guide for students / 1
TK7875 .G66 2014 Poly-SiGe for MEMS-above-CMOS sensors 1