Search Results - Shea, Herbert R.

Reliability, packaging, testing, and characterization of MOEMS/MEMS, nanodevices, and nanomaterials XIII : 3-4 February 2014, San Francisco, California, United States /

Other Authors: “…Shea, Herbert R.…”
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Reliability, packaging, testing, and characterization of MOEMS/MEMS and nanodevices XII : 4-5 February 2013, San Francisco, California, United States /

Other Authors: “…Shea, Herbert R.…”
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MEMs reliability by Hartzell, Allyson L.

Other Authors: “…Shea, Herbert R.…”
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Smart sensors, actuators, and MEMS IV 4-6 May 2009, Dresden, Germany /

Other Authors: “…Shea, Herbert R.…”
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