A guide to hands-on MEMS design and prototyping / Joel Kubby.
"Whether you are a student taking an introductory MEMS course or a practising engineer who needs to get up to speed quickly on MEMS design, this practical guide provides the hands-on experience needed to design, fabricate and test MEMS devices. You will learn how to use foundry multi-project fa...
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Full Text (via ProQuest) |
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| Format: | eBook |
| Language: | English |
| Published: |
Cambridge, UK ; New York :
Cambridge University Press,
2011.
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| Subjects: |
Table of Contents:
- Preface; 1 Introduction; 2 Micromechanics; 3 Electrostatic Actuation; 4 Optical MEMS; 5 Thermal MEMS; 6 Fluidic MEMS; 7 Package and Test; 8 From Prototype to Product: MEMS Deformable Mirrors for Adaptive Optics.