APA (7th ed.) Citation

Powell, R. A., & Rossnagel, S. M. (1999). PVD for microelectronics: Sputter deposition applied to semiconductor manufacturing. Academic Press.

Chicago Style (17th ed.) Citation

Powell, Ronald A., and Stephen M. Rossnagel. PVD for Microelectronics: Sputter Deposition Applied to Semiconductor Manufacturing. San Diego: Academic Press, 1999.

MLA (9th ed.) Citation

Powell, Ronald A., and Stephen M. Rossnagel. PVD for Microelectronics: Sputter Deposition Applied to Semiconductor Manufacturing. Academic Press, 1999.