PVD for microelectronics [electronic resource] : sputter deposition applied to semiconductor manufacturing / Ronald A. Powell, Stephen M. Rossnagel.
GENERAL DESCRIPTION OF THE SERIES Physics of Thin Films is one of the longest running continuing series in thin film science, consisting of 25 volumes since 1963. The series contains quality studies of the properties of various thin films materials and systems. In order to be able to reflect the dev...
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| Online Access: |
Full Text (via ScienceDirect) |
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| Main Author: | |
| Other Authors: | |
| Format: | Electronic eBook |
| Language: | English |
| Published: |
San Diego :
Academic Press,
©1999.
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| Series: | Thin films (San Diego, Calif.) ;
v. 26. |
| Subjects: |
| Summary: | GENERAL DESCRIPTION OF THE SERIES Physics of Thin Films is one of the longest running continuing series in thin film science, consisting of 25 volumes since 1963. The series contains quality studies of the properties of various thin films materials and systems. In order to be able to reflect the development of today's science and to cover all modern aspects of thin films, the series, starting with Volume 20, has moved beyond the basic physics of thin films. It now addresses the most important aspects of both inorganic and organic thin films, in both their theoretical as well as technological aspects. Therefore, in order to reflect the modern technology-oriented problems, the title has been slightly modified from Physics of Thin Films to Thin Films. GENERAL DESCRIPTION OF THE VOLUME This volume, part of the Thin Films Series, has been wholly written by two authors instead of showcasing several edited manuscripts. |
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| Physical Description: | 1 online resource (xiii, 419 pages) : illustrations. |
| Bibliography: | Includes bibliographical references and indexes. |
| ISBN: | 9780125330268 012533026X 9780080542928 0080542921 |
| Source of Description, Etc. Note: | Source of description: Print version record. |