PVD for microelectronics [electronic resource] : sputter deposition applied to semiconductor manufacturing / Ronald A. Powell, Stephen M. Rossnagel.

GENERAL DESCRIPTION OF THE SERIES Physics of Thin Films is one of the longest running continuing series in thin film science, consisting of 25 volumes since 1963. The series contains quality studies of the properties of various thin films materials and systems. In order to be able to reflect the dev...

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Bibliographic Details

Online Access:	Full Text (via ScienceDirect)
Main Author:	Powell, Ronald A.
Other Authors:	Rossnagel, Stephen M.
Format:	Electronic eBook
Language:	English
Published:	San Diego : Academic Press, ©1999.
Series:	Thin films (San Diego, Calif.) ; v. 26.
Subjects:	Thin film devices > Design and construction. Vapor-plating. Thin films.