Resolving 500 nm axial separation by multi-slice X-ray ptychography [electronic resource]

X-Ray Ptychography; Multi-Slice Approach; Nanostructures.

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Bibliographic Details
Online Access: Online Access (via OSTI)
Corporate Author: Brookhaven National Laboratory (Researcher)
Format: Government Document Electronic eBook
Language:English
Published: Washington, D.C. : Oak Ridge, Tenn. : United States. Department of Energy. Office of Basic Energy Sciences ; distributed by the Office of Scientific and Technical Information, U.S. Department of Energy, 2019.
Subjects:

MARC

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245 0 0 |a Resolving 500 nm axial separation by multi-slice X-ray ptychography  |h [electronic resource] 
260 |a Washington, D.C. :  |b United States. Department of Energy. Office of Basic Energy Sciences ;  |a Oak Ridge, Tenn. :  |b distributed by the Office of Scientific and Technical Information, U.S. Department of Energy,  |c 2019. 
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500 |a Published through SciTech Connect. 
500 |a 02/12/2019. 
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500 |a Acta Crystallographica. Section A, Foundations and Advances (Online) 75 2 ISSN 2053-2733; ACSAD7 AM. 
500 |a Xiaojing Huang; Hanfei Yan; Yan He; Mingyuan Ge; Hande Öztürk; Yao-Lung L. Fang; Sungsoo Ha; Meifeng Lin; Ming Lu; Evgeny Nazaretski; Ian K. Robinson; Yong S. Chu. 
520 3 |a <p>Multi-slice X-ray ptychography offers an approach to achieve images with a nanometre-scale resolution from samples with thicknesses larger than the depth of field of the imaging system by modeling a thick sample as a set of thin slices and accounting for the wavefront propagation effects within the specimen. Here, we present an experimental demonstration that resolves two layers of nanostructures separated by 500 nm along the axial direction, with sub-10 nm and sub-20 nm resolutions on two layers, respectively. Fluorescence maps are simultaneously measured in the multi-modality imaging scheme to assist in decoupling the mixture of low-spatial-frequency features across different slices. As a result, the enhanced axial sectioning capability using correlative signals obtained from multi-modality measurements demonstrates the great potential of the multi-slice ptychography method for investigating specimens with extended dimensions in 3D with high resolution.</p> 
520 0 |a X-Ray Ptychography; Multi-Slice Approach; Nanostructures. 
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710 2 |a Brookhaven National Laboratory.  |4 res. 
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