Mechanical properties of silicon based compounds : silicides / Joshua Pelleg.

This book focuses on the mechanical properties of silicides for very large scale integration (VLSI) applications. It presents the fabrication process for bulk silicides and thin films, and list complete testing deformation for a variety of silicon based compounds. The author also presents dislocatio...

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Bibliographic Details

Online Access:	Full Text (via Springer)
Main Author:	Pelleg, Joshua (Author)
Format:	eBook
Language:	English
Published:	Cham, Switzerland : Springer, [2019]
Series:	Engineering materials.
Subjects:	Silicides > Mechanical properties. Silicides.