Handbook of cleaning for semiconductor manufacturing : fundamentals and applications / Karen A. Reinhardt, Richard F. Reidy.
This comprehensive volume provides an in-depth discussion of the fundamentals of cleaning and surface conditioning of semiconductor applications such as high-k/metal gate cleaning, copper/low-k cleaning, high dose implant stripping, and silicon and SiGe passivation. The theory and fundamental physic...
Saved in:
| Online Access: |
Full Text (via ProQuest) |
|---|---|
| Main Author: | |
| Other Authors: | |
| Format: | Electronic eBook |
| Language: | English |
| Published: |
Salem, Mass. ; Scrivener ; Hoboken, N.J. :
John Wiley & Sons, Inc.,
©2011.
|
| Series: | Wiley-Scrivener.
|
| Subjects: |
Internet
Full Text (via ProQuest)Online
| Call Number: |
QC611.6.S9 R456 2011eb
|
|---|---|
| QC611.6.S9 R456 2011eb | Available |