Ultra Clean Processing of Semiconductor Surfaces XV.
Selected peer-reviewed full text papers from the 15th International Symposium on Ultra Clean Processing of Semiconductor Surfaces (UCPSS) Selected, peer-reviewed papers from the 15-th International Symposium on Ultra Clean Processing of Semiconductor Surfaces (UCPSS), April 12-15, 2021, Mechelen, Be...
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| Online Access: |
Full Text (via Knovel) |
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| Main Author: | |
| Other Authors: | , , |
| Format: | eBook |
| Language: | English |
| Published: |
Zurich :
Trans Tech Publications, Limited,
2021.
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| Series: | Solid State Phenomena Ser.
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| Subjects: |
| Summary: | Selected peer-reviewed full text papers from the 15th International Symposium on Ultra Clean Processing of Semiconductor Surfaces (UCPSS) Selected, peer-reviewed papers from the 15-th International Symposium on Ultra Clean Processing of Semiconductor Surfaces (UCPSS), April 12-15, 2021, Mechelen, Belgium. |
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| Physical Description: | 1 online resource (325 pages) |
| ISBN: | 3035738017 9783035738018 |
| Source of Description, Etc. Note: | Print version record. |