MEMS Silicon Oscillating Accelerometers and Readout Circuits [electronic resource]
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Full Text (via Taylor & Francis) |
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| Format: | Electronic eBook |
| Language: | English |
| Published: |
Aalborg :
River Publishers,
2019.
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| Series: | River Publishers Series in Circuits and Systems Ser.
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| Subjects: |
Table of Contents:
- Front Cover; Half Title Page; RIVER PUBLISHERS SERIES IN CIRCUITS AND SYSTEMS; Title Page; Copyright Page; Contents; Preface; List of Contributors; List of Figures; List of Tables; List of Abbreviations; List of Notations; Chapter 1
- Mechanical Design of Micromechanical Silicon Oscillating Accelerometer; 1.1 Introduction; 1.2 Mechanical Structure Design; 1.2.1 Theory of Operation; 1.2.2 Modelling of DETF Resonator for Closed-form Analysis; 1.2.3 Micro Lever Mechanism and Amplification Factor; 1.2.4 System Amplification Factor n0; 1.2.5 Scale Factor; 1.2.6 Bias; 1.2.7 Thermal Sensitivity.
- 1.2.8 Stiffness Nonlinearity1.3 Fabrication and Testing; 1.3.1 SOA Fabrication; 1.3.2 Testing; 1.4 Conclusion; References; Chapter 2
- Front-end Amplifiers for MEMS Silicon Oscillating Accelerometers; 2.1 Capacitive Sensing in MEMS Sensors; 2.2 Front-end Amplifiers for MEMS Oscillators; 2.2.1 Single-Stage Resistive Feedback TIA; 2.2.1.1 Stability and bandwidth; 2.2.1.2 Input-referred noise; 2.2.2 Two-Stage Resistive Feedback TIA; 2.2.3 T-Network Resistive Feedback TIA; 2.2.4 Charge-Sensing Amplifier (CSA); 2.2.5 Capacitive Feedback TIA; 2.3 Front-end Amplifier for MEMS SOA.
- 2.3.1 Concept of MEMS SOA and its Front-end2.3.2 Continuous-Time Integrator-Differentiator-Based TIA; 2.3.3 Discrete-Time Integrator-Differentiator-Based Amplifier; 2.3.4 Front-end Based on Passive Charge Sensing; 2.4 Summary; References; Chapter 3
- MEMS Silicon Oscillating Accelerometer Readout Circuit; 3.1 Introduction; 3.1.1 Concept of MEMS Silicon Oscillating Accelerometer (SOA); 3.1.2 Readout Circuits for MEMS SOA; 3.1.3 Acceleration Noise Characterization; 3.2 Readout Circuit; 3.2.1 MEMS Oscillator; 3.2.1.1 Front-end amplifier; 3.2.1.2 Oscillation-sustaining circuit.
- 3.2.2 Amplitude Control3.2.2.1 Amplitude-stiffness effect; 3.2.2.2 Noise model of the AAC loop; 3.2.3 Phase Noise of the MEMS Oscillator; 3.3 Circuit Implementation; 3.3.1 Overall Readout Circuit at System Level; 3.3.2 Front-end Amplifier; 3.3.3 AAC Circuits; 3.3.4 Amplitude Detector; 3.3.5 Buffer; 3.3.6 Error Amplifier; 3.3.7 Variable Gain Amplifier (VGA); 3.4 Performance; 3.5 Conclusion; References; Chapter 4
- An MEM Silicon Oscillating Accelerometer Employing a PLL and a Noise Shaping Frequency-to-Digital Converter; 4.1 Introduction; 4.2 PLL-Based MEMS SOA; 4.2.1 Noise Aliasing.
- 4.2.2 Start-up Issue4.2.3 PLL Phase Tracking; 4.3 PLL-Based Sigma-Delta FDC; 4.3.1 A Brief Review of Existing FDCs; 4.3.1.1 Reset counter-based FDC; 4.3.1.2 Delta-sigma FDC (FDC); 4.3.1.3 PLL-based FDC (PLL-FDC); 4.3.2 A Modified PLL-based FDC (MPLL-FDC); 4.3.3 Analysis of Quantization Error in MPLL-FDC; 4.4 Stability of the PLL with a Hybrid PFD; 4.5 Noises in PLL-Based MEMS SOA; 4.6 Key Circuit Designs for PLL-based MEMS SOA; 4.6.1 Analog Front-end Amplifier; 4.6.2 Hybrid Mode Phase Frequency Detector; 4.6.3 Phase-Lock Loop with FDC.