Handbook of plasma processing technology : fundamentals, etching, deposition, and surface interactions / edited by Stephen M. Rossnagel, Jerome J. Cuomo, William D. Westwood.

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Bibliographic Details
Other Authors:	Rossnagel, Stephen M., Cuomo, J. J., Westwood, William D. (William Dickson), 1937-
Format:	Book
Language:	English
Published:	Park Ridge, N.J., U.S.A. : Noyes Publications, 1990.
Series:	Materials science and process technology series.
Subjects:	Plasma engineering. Semiconductors > Etching. Plasma etching.

Handbook of plasma processing technology fundamentals, etching, deposition, and surface interactions /

Published 1990

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