The physics of micro/nano-fabrication / Ivor Brodie and Julius J. Muray.

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Bibliographic Details
Main Author:	Brodie, Ivor
Other Authors:	Muray, Julius J.
Format:	Book
Language:	English
Published:	New York : Plenum Press, ©1992.
Series:	Microdevices.
Subjects:	Microelectronics. Thin-film circuits.

The physics of micro/nano-fabrication by Brodie, Ivor

Published 1992

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