Antireflecting-chromium linewidth standard, SRM 475, for calibration of optical microscope linewidth measuring systems [microform] / Carol F. Vezzetti, Ruth N. Varner, James E. Potzick.

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Bibliographic Details
Main Author:	Vezzetti, Carol F.
Corporate Author:	National Institute of Standards and Technology (U.S.)
Other Authors:	Varner, Ruth N., Potzick, James E.
Other title:	Antireflecting chromium linewidth standard, SRM 475, for calibration of optical microscope linewidth measuring systems.
Format:	Government Document Microfilm Book
Language:	English
Published:	Gaithersburg, MD : [Springfield, VA] : U.S. Dept. of Commerce, National Institute of Standards and Technology ; [Order from National Technical Information Service], 1992.
Series:	Standard reference materials. NIST special publication ; 260-117.
Subjects:	Integrated circuits > Calibration > Standards. Microscopy > Calibration > Standards. Microscopes > Calibration > Standards. Optical measurements > Standards.

Description
Item Description:	Distributed to depository libraries in microfiche. Shipping list number: 92-2096-M. Paper version no longer for sale by the Supt. of Docs. "Issued January 1992."
Physical Description:	xi, 37 pages : illustrations ; 28 cm.
Bibliography:	Includes bibliographical references.
Reproduction Note:	Microfiche.
Type of Report and Period Covered Note:	Final.

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