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|a (OCoLC)ocm43167497
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|a CUS
|c CUS
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| 049 |
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|a CODI
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| 090 |
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|a TK7874
|b .E38 1999
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| 245 |
0 |
0 |
|a Education in microelectronics and MEMS :
|b 28-29 October 1999, Royal Pines Resort, Queensland, Australia /
|c Fred Payne, Ash M. Parameswaran, chairs/editors ; sponsored by SPIE--the International Society for Optical Engineering, IREE Society (Australia), [and] Queensland Government State Development (Australia) ; cooperating organizations, LeGUMES--the Griffith University Microelectronics Engineering Society (Australia) [and others]
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| 260 |
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|a Bellingham, Wash., USA :
|b SPIE,
|c ©1999.
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| 300 |
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|a v, 178 pages :
|b illustrations ;
|c 28 cm.
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| 336 |
|
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|a text
|b txt
|2 rdacontent.
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| 337 |
|
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|a unmediated
|b n
|2 rdamedia.
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| 338 |
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|a volume
|b nc
|2 rdacarrier.
|
| 490 |
1 |
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|a SPIE proceedings series ;
|v v. 3894.
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| 504 |
|
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|a Includes bibliographical references and index.
|
| 583 |
1 |
|
|a committed to retain
|c 20240101
|d 20490101
|5 CoU
|f Alliance Shared Trust
|u https://www.coalliance.org/shared-print-archiving-policies
|
| 650 |
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0 |
|a Microelectronics
|x Study and teaching
|v Congresses.
|
| 650 |
|
0 |
|a Microelectromechanical systems
|x Study and teaching
|v Congresses.
|
| 700 |
1 |
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|a Parameswaran, Ash M.
|0 http://id.loc.gov/authorities/names/n00008775.
|
| 700 |
1 |
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|a Payne, Fred R.
|0 http://id.loc.gov/authorities/names/n85177209
|1 http://isni.org/isni/0000000024803386.
|
| 710 |
2 |
|
|a Society of Photo-Optical Instrumentation Engineers.
|0 http://id.loc.gov/authorities/names/n78088934
|1 http://isni.org/isni/0000000122965856.
|
| 710 |
2 |
|
|a Institution of Radio and Electronics Engineers, Australia.
|0 http://id.loc.gov/authorities/names/n50077663
|1 http://isni.org/isni/0000000121921958.
|
| 710 |
1 |
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|a Queensland.
|b Government State Development.
|0 http://id.loc.gov/authorities/names/n2001005860.
|
| 710 |
2 |
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|a Griffith University Microelectronics Engineering Society.
|0 http://id.loc.gov/authorities/names/no00007313.
|
| 830 |
|
0 |
|a Proceedings of SPIE--the International Society for Optical Engineering ;
|v v. 3894.
|0 http://id.loc.gov/authorities/names/n42030541.
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| 907 |
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|p Can circulate
|a University of Colorado Boulder
|b Boulder Campus
|c Offsite
|d PASCAL Offsite
|e TK7874 .E38 1999
|h Library of Congress classification
|i book
|m P208171713004
|n 1
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