Microchip fabrication : a practical guide to semiconductor processing / Peter Van Zant.
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| Main Author: | |
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| Format: | Book |
| Language: | English |
| Published: |
New York :
McGraw-Hill,
©2000.
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| Edition: | 4th ed. |
| Subjects: |
| Physical Description: | xvi, 632 pages : illustrations ; 24 cm. |
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| Bibliography: | Includes bibliographical references and index. |
| ISBN: | 0071356363 |