Handbook of advanced plasma processing techniques / R.J. Shul, S.J. Pearton (eds.)
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| Other Authors: | , |
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| Format: | Book |
| Language: | English |
| Published: |
Berlin ; New York :
Springer,
©2000.
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| Subjects: |
| Physical Description: | xvi, 653 pages : illustrations ; 24 cm. |
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| Bibliography: | Includes bibliographical references and index. |
| ISBN: | 3540667725 (Berlin : alk. paper) |