MEMS design, fabrication, characterization, and packaging : 30 May-1 June 2001, Edinburgh, UK / Uwe F.W. Behringer, Deepak G. Uttamchandani, chairs/editors ; sponsored ... by SPIE--the International Society for Optical Engineering ; cosponsored by Scottish Enterprise (UK) ; cooperating organizations, EOS--European Optical Society [and] IEE--the Institution of Electrical Engineers (UK)
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| Corporate Authors: | , , , |
|---|---|
| Other Authors: | , |
| Other title: | Microelectromechanical systems design, fabrication, characterization, and packaging. |
| Format: | Book |
| Language: | English |
| Published: |
Bellingham, Wash., USA :
SPIE,
©2001.
|
| Series: | Proceedings of SPIE--the International Society for Optical Engineering ;
v. 4407. |
| Subjects: |
Closed Stacks - Engineering Math & Physics Library - Stacks
| Call Number: |
TK7875 .M39 2001
|
|---|---|
| TK7875 .M39 2001 | Available Place a Hold |