MEMS length and strain measurements using an optical interferometer [microform] / J.C. Marshall.

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Bibliographic Details
Main Author:	Marshall, J. C. (Janet C.)
Corporate Author:	National Institute of Standards and Technology (U.S.)
Format:	Government Document Microfilm Book
Language:	English
Published:	Gaithersburg, MD : U.S. Dept. of Commerce, Technology Administration, National Institute of Standards and Technology, [2001]
Series:	NISTIR ; 6779.
Subjects:	Microelectromechanical systems. Interferometers.

MEMS length and strain measurements using an optical interferometer / by Marshall, J. C.

Published 2001

Online Access

Government Document eBook