Micromachining and microfabrication process technology VII [electronic resource] : 22-24 October, 2001, San Francisco, [California] USA / Jean Michel Karam, John Yasaitis, chairs/editors ; sponsored and published by SPIE--the International Society for Optical Engineering ; cooperating organizations, Semiconductor Equipment and Materials International (USA) [and others]

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Bibliographic Details
Online Access:	Full Text (via SPIE Digital Library)
Corporate Authors:	Society of Photo-Optical Instrumentation Engineers, Semiconductor Equipment and Materials International
Other Authors:	Karam, Jean-Michel, Yasaitis, John
Other title:	SPIE digital library.
Format:	Electronic eBook
Language:	English
Published:	Bellingham, Wash. : SPIE, ©2001.
Series:	Proceedings of SPIE--the International Society for Optical Engineering ; v. 4557.
Subjects:	Micromachining > Congresses. Microfabrication > Congresses. Electromechanical devices > Design and construction > Congresses. Electromechanical devices > Design and construction. Microfabrication. Micromachining. Conference papers and proceedings.

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Call Number:	QC176.8.M5 M43 2001
QC176.8.M5 M43 2001	Available