Smart sensors, actuators, and MEMS [electronic resource] : 19-21 May 2003, Maspalomas, Gran Canaria, Spain / Jung-Chih Chiao, Vijay K. Varadan, Carles Cané, chairs/editors ; sponsored ... by SPIE--the International Society for Optical Engineering ; cosponsored by Spanish Government [and others] ; cooperating organizations, Las Palmas University Foundation [and] Sociedad Española de Optica (SEDO)

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Bibliographic Details
Online Access:	Full Text (via SPIE Digital Library)
Corporate Authors:	Society of Photo-Optical Instrumentation Engineers, Universidad de Las Palmas de Gran Canaria, Sociedad Española de Óptica (Spain), SPIE Digital Library
Other Authors:	Chiao, Jung-Chih, Varadan, V. K., 1943-, Cané, Carles
Format:	Electronic eBook
Language:	English
Published:	Bellingham, Wash. USA : SPIE, 2003.
Series:	Proceedings of SPIE--the International Society for Optical Engineering ; v. 5116.
Subjects:	Microelectromechanical systems > Congresses. Microtechnology > Congresses. Actuators > Industrial applications > Congresses. Detectors > Industrial applications > Congresses. Scanning systems > Congresses.

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Call Number:	TK7875 .S52 2003
TK7875 .S52 2003	Available