Microlithographic techniques in IC fabrication [electronic resource] : 25-26 June, 1997, Singapore / Soon-Fatt Yoon, Raymond Yu, Chris A. Mack, chairs/editors ; sponsored by SPIE--the International Society for Optical Engineering, SPIE Singapore Chapter, Institute of Physics Singapore ; cosponsored by SPIE Japan Chapter [and others] ; cooperating organizations Nanyang Technological University (Singapore) [and others] ; published by SPIE--the International Society for Optical Engineering.
Saved in:
| Online Access: |
Full Text (via SPIE Digital Library) |
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| Corporate Authors: | , , , , |
| Other Authors: | , , |
| Format: | Electronic eBook |
| Language: | English |
| Published: |
Bellingham, Wash. :
SPIE,
©1997.
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| Series: | Proceedings of SPIE--the International Society for Optical Engineering ;
v. 3183. |
| Subjects: |
| Physical Description: | vii, 264 pages : illustrations ; 28 cm. |
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| Bibliography: | Includes bibliographical references and author index. |
| ISBN: | 0819426105 9780819426109 |
| ISSN: | 0277-786X ; |