Optical characterization techniques for high-performance microelectronic device manufacturing II [electronic resource] : 25-26 October 1995, Austin, Texas / John K. Lowell, Ray T. Chen, Jagdish P. Mathur, chairs/editors ; sponsored and published by SPIE--the International Society for Optical Engineering.

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Bibliographic Details
Online Access:	Full Text (via SPIE Digital Library)
Corporate Authors:	Society of Photo-Optical Instrumentation Engineers, SPIE Digital Library
Other Authors:	Lowell, John, Chen, Ray T., Mathur, Jagdish P.
Format:	Electronic eBook
Language:	English
Published:	Bellingham, Wash. : SPIE, ©1995.
Series:	Proceedings of SPIE--the International Society for Optical Engineering ; v. 2638.
Subjects:	Integrated circuits industry > Congresses. Manufacturing processes > Congresses. Semiconductors > Design and construction > Congresses. Integrated circuits > Design and construction > Congresses. Semiconductors > Testing > Optical methods > Congresses. Optical detectors > Congresses. Integrated circuits > Design and construction. Integrated circuits industry. Manufacturing processes. Optical detectors. Semiconductors > Design and construction. Semiconductors > Testing > Optical methods. Conference papers and proceedings.

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Call Number:	TK7836 .O68 1995
TK7836 .O68 1995	Available