MOEMS : micro-opto-electro-mechanical systems / Manouchehr E. Motamedi, editor.
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| Other Authors: | |
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| Format: | Book |
| Language: | English |
| Published: |
Bellingham, Wash. :
SPIE Press--The International Society for Optical Engineering,
©2005.
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| Subjects: |
| Physical Description: | xxi, 614 pages : illustrations ; 27 cm. |
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| Bibliography: | Includes bibliographical references and index. |
| ISBN: | 0819450219 |