MOEMS : micro-opto-electro-mechanical systems / Manouchehr E. Motamedi, editor.

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Bibliographic Details
Other Authors:	Motamedi, M. Edward
Format:	Book
Language:	English
Published:	Bellingham, Wash. : SPIE Press--The International Society for Optical Engineering, ©2005.
Subjects:	Microelectromechanical systems. Optoelectronic devices. Microfabrication.

MOEMS : micro-opto-electro-mechanical systems /

Published 2005

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