Micromachining and microfabrication process technology II [electronic resource] : 14-15 October, 1996, Austin, Texas / Stella W. Pang, Shih-Chia Chang, chairs/editors ; sponsored by SPIE--the International Society for Optical Engineering, SEMI--Semiconductor Equipment and Materials International, NIST--National Institute of Standards and Technology ; cooperating organizations, Solid State Technology, Sandia National Laboratories.

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Bibliographic Details
Online Access:	Full Text (via SPIE Digital Library)
Corporate Authors:	Society of Photo-Optical Instrumentation Engineers, Semiconductor Equipment and Materials International, National Institute of Standards and Technology (U.S.)
Other Authors:	Pang, Stella W., Chang, Shih-Chia
Other title:	SPIE digital library.
Format:	Electronic eBook
Language:	English
Published:	Bellingham, Wash. : SPIE--The International Society of Optical Engineering, ©1996.
Series:	Proceedings of SPIE--the International Society for Optical Engineering ; v. 2879.
Subjects:	Micromachining > Congresses. Microfabrication > Congresses. Electromechanical devices > Design and construction > Congresses. Electromechanical devices > Design and construction. Microfabrication. Micromachining. Conference papers and proceedings.

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Call Number:	QC176.8.M5 M43 1996
QC176.8.M5 M43 1996	Available