MEMS and microsystems : design, manufacture, and nanoscale engineering / Tai-Ran Hsu.

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Bibliographic Details
Main Author:	Hsu, Tai-Ran
Format:	Book
Language:	English
Published:	Hoboken, N.J. : John Wiley, ©2008.
Edition:	2nd ed.
Subjects:	Microelectronics. Microelectromechanical systems. Microelectronic packaging.

Mems and microsystems : design, manufacture, and nanoscale engineering / by Hsu, Tai-Ran

Published 2008

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