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|a (TOE)ost742
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|a (TOE)742
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|a TOE
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|a E 1.99:sand--98-2069c
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|a E 1.99:sand--98-2069c
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| 088 |
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|a sand--98-2069c
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| 245 |
0 |
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|a Micromachined Systems-on-a-Chip
|h [electronic resource] :
|b Infrastructure, Technology and Applications.
|
| 260 |
|
|
|a Washington, D.C. :
|b United States. Department of Energy. ;
|a Oak Ridge, Tenn. :
|b distributed by the Office of Scientific and Technical Information, U.S. Department of Energy,
|c 1998.
|
| 336 |
|
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|a text
|b txt
|2 rdacontent.
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| 337 |
|
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|a computer
|b c
|2 rdamedia.
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| 338 |
|
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|a online resource
|b cr
|2 rdacarrier.
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| 500 |
|
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|a Published through SciTech Connect.
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| 500 |
|
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|a 10/09/1998.
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| 500 |
|
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|a "sand--98-2069c"
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| 500 |
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|a NonoSpace 98, League City, TX, 11/01/1998.
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| 500 |
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|a Allen, J. J.; Smith, J. H.; Krygowski, T. W.; Miller, S. L.; Montague, S.; Rodgers, M. S.; Schriner, H.; Sniegowski, J. J.
|
| 520 |
3 |
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|a A review is made of the infrastructure, technology and capabilities of Sandia National Laboratories for the development of micromechanical systems that have potential space applications. By incorporating advanced fabrication processes, such as chemical mechanical polishing, and several mechanical polysilicon levels, the range' of rrticromechanical systems that can be fabricated in these technologies is virtually limitless. Representative applications include a micro- engine driven mirror, and a micromachined lock. Using a novel integrated MEM!YCMOS technology, a six degree-of-freedom accelerometer/gyroscope system has been designed by researchers at U.C. Berkeley and fabricated on the same silicon chip as the CMOS control circuits to produce an integrated micro-navigational unit.
|
| 536 |
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|b AC04-94AL85000.
|
| 650 |
|
7 |
|a Energy.
|2 local.
|
| 650 |
|
7 |
|a Energy.
|2 edbsc.
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| 700 |
1 |
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|a Allen, J. J.
|4 aut.
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| 700 |
1 |
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|a Smith, J. H.
|4 aut.
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| 700 |
1 |
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|a Krygowski, T. W.
|4 aut.
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| 700 |
1 |
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|a Miller, S. L.
|4 aut.
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| 700 |
1 |
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|a Montague, S.
|4 aut.
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| 700 |
1 |
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|a Rodgers, M. S.
|4 aut.
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| 700 |
1 |
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|a Schriner, H.
|4 aut.
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| 700 |
1 |
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|a Sniegowski, J. J.
|4 aut.
|
| 710 |
2 |
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|a Sandia National Laboratories.
|4 res.
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| 710 |
1 |
|
|a United States.
|b Department of Energy.
|4 spn.
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| 710 |
1 |
|
|a United States.
|b Department of Energy.
|b Office of Scientific and Technical Information.
|4 dst.
|
| 856 |
4 |
0 |
|u http://www.osti.gov/servlets/purl/742/
|z Online Access
|
| 907 |
|
|
|a .b56263260
|b 03-06-23
|c 12-16-09
|
| 998 |
|
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|a web
|b 08-04-15
|c f
|d m
|e p
|f eng
|g
|h 0
|i 2
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|a Information bridge
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|s eaf14eaa-5330-5e5b-870f-a8ebe516082b
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| 952 |
f |
f |
|p Can circulate
|a University of Colorado Boulder
|b Online
|c Online
|d Online
|e E 1.99:sand--98-2069c
|h Superintendent of Documents classification
|i web
|n 1
|
