Micromachined Systems-on-a-Chip [electronic resource] : Infrastructure, Technology and Applications.

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Bibliographic Details
Online Access:	Online Access
Main Authors:	Allen, J. J. (Author), Smith, J. H. (Author), Krygowski, T. W. (Author), Miller, S. L. (Author), Montague, S. (Author), Rodgers, M. S. (Author), Schriner, H. (Author), Sniegowski, J. J. (Author)
Corporate Author:	Sandia National Laboratories (Researcher)
Format:	Government Document Electronic eBook
Language:	English
Published:	Washington, D.C. : Oak Ridge, Tenn. : United States. Department of Energy. ; distributed by the Office of Scientific and Technical Information, U.S. Department of Energy, 1998.
Subjects:	Energy.

Micromachined systems-on-a-chip Infrastructure, technology and applications.

Published 1998

Online Access

Government Document Electronic eBook