A piezoelectric MEMS microphone based on lead zirconate titanate (PZT) thin films [electronic resource] / Ronald G. Polcawich.

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Bibliographic Details
Online Access:	Online Access Online Access
Main Author:	Polcawich, Ronald G.
Corporate Author:	U.S. Army Research Laboratory
Format:	Government Document Electronic eBook
Language:	English
Published:	Adelphi, MD : Army Research Laboratory, [2004]
Series:	ARL-TR (Aberdeen Proving Ground, Md.) ; 3387.
Subjects:	Microelectromechanical systems. Microphone.

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Call Number:	D 101.133:3387
D 101.133:3387	Available