Cold plasma in materials fabrication [electronic resource] : from fundamentals to applications / Alfred Grill.
Cold plasma research and development activities, as well as its applications in materials processing have grown enormously in the past decade. Cold Plasma in Materials Fabrication is a comprehensive, up-to-date monograph which presents all aspects of cold, low-pressure plasmas. The eight extensive c...
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| Format: | Electronic eBook |
| Language: | English |
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Piscataway, NJ : New York :
IEEE Press ; Institute of Electrical and Electronics Engineers,
©1994.
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| 245 | 1 | 0 | |a Cold plasma in materials fabrication |h [electronic resource] : |b from fundamentals to applications / |c Alfred Grill. |
| 260 | |a Piscataway, NJ : |b IEEE Press ; |a New York : |b Institute of Electrical and Electronics Engineers, |c ©1994. | ||
| 300 | |a 1 online resource (xiii, 257 pages) : |b illustrations. | ||
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| 504 | |a Includes bibliographical references and index. | ||
| 505 | 0 | |a 1. Fundamentals of Plasma -- 2. Cold Plasma Generation -- 3. Plasma Chemistry -- 4. Plasma Reactors -- 5. Plasma Diagnostics -- 6. Cold Plasma Processes for Surface Modification -- 7. Deposition of Coatings by PECVD -- 8. Plasma Assisted Etching. | |
| 520 | |a Cold plasma research and development activities, as well as its applications in materials processing have grown enormously in the past decade. Cold Plasma in Materials Fabrication is a comprehensive, up-to-date monograph which presents all aspects of cold, low-pressure plasmas. The eight extensive chapters in this book cover the following topics: . The main parameters and classifications of different types of plasma. Reactions within cold plasmas and between cold plasmas and solid surfaces. State-of-the-art methods for generation and diagnostics of cold plasmas and their application for processing of materials This invaluable reference tool provides a helpful bibliography with suggestions for further reading on each subject. The book will be of importance to manufacturing engineers and scientists, as well as advanced students in engineering, materials, physics, and chemistry programs. | ||
| 588 | 0 | |a Print version record. | |
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