X-ray measurements of the depth dependence of stress in gold films [electronic resource]
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| Online Access: |
Online Access |
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| Corporate Author: | |
| Format: | Government Document Electronic eBook |
| Language: | English |
| Published: |
Washington, D.C : Oak Ridge, Tenn. :
United States. Dept. of Energy ; distributed by the Office of Scientific and Technical Information, U.S. Dept. of Energy,
2000.
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| Subjects: |
| Abstract: | X-rays are used to determine the stress as a function of depth for five evaporated gold films of 0.8--2.5 microns thickness. The depth dependence is achieved by varying the incident angle of the x-rays, which effects the penetration depth of the x-rays into the film. The films, which have a different thermal expansion coefficient than the silicon substrate, are strained as a result of thermal cycling after deposition. The authors find essentially no variation with stress as a function of depth for these films. |
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| Item Description: | Published through the Information Bridge: DOE Scientific and Technical Information. 01/12/2000. "anl/chm/cp-100850" 6th International Conference on surface X-ray and neutron Scattering (6SXNS), Noordwijerkhout (NL), 09/12/1999--09/17/1999. Brennan, S.; Nix, W. D.; Munkholm, A.; Leung, O. S. |
| Physical Description: | 6 pages : digital, PDF file. |