Diffusion Resistant, High-Purity Wafer Carriers For SI Semiconductor Production [electronic resource]

Saved in:

Bibliographic Details
Online Access:	Online Access
Corporate Author:	Oak Ridge National Laboratory (Researcher)
Format:	Government Document Electronic eBook
Language:	English
Published:	Washington, D.C. : Oak Ridge, Tenn. : United States. Dept. of Energy. Office of Science ; distributed by the Office of Scientific and Technical Information, U.S. Dept. of Energy, 2000.
Subjects:	Molybdates. Carbon. Diffusion. Fabrication. Process Control. Precursor. Molybdenum Carbides. Pyrolysis. Production. Materials Science.

Diffusion Resistant, High-Purity Wafer Carriers For SI Semiconductor Production

Published 2000

Online Access (via OSTI)

Government Document Electronic eBook