Microsystems and nanotechnology [electronic resource] / Zhaoying Zhou, Zhonglin Wang, Liwei Lin, [editors]

"Microsystems and Nanotechnology" presents the latest science and engineering research and achievements in the fields of microsystems and nanotechnology, bringing together contributions by authoritative experts from the United States, Germany, Great Britain, Japan and China to discuss the...

Full description

Bibliographic Details

Online Access:	Full Text (via Springer)
Other Authors:	Zhou, Zhaoying, Wang, Zhonglin, Lin, Liwei
Format:	Electronic eBook
Language:	English
Published:	Beijing : Berlin : Tsinghua University Press ; Springer, 2012.
Subjects:	Microelectromechanical systems. Nanotechnology.