Advanced mechatronics and MEMS devices [electronic resource] / Dan Zhang, editor.

Advanced Mechatronics and MEMS Devicesdescribes state-of-the-art MEMS devices and introduces the latest technology in electrical and mechanical microsystems. The evolution of design in microfabrication, as well as emerging issues in nanomaterials, micromachining, micromanufacturing and microassembly...

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Bibliographic Details

Online Access:	Full Text (via Springer)
Other Authors:	Zhang, Dan, 1964-
Format:	Electronic eBook
Language:	English
Published:	New York, NY : Springer, ©2013.
Series:	Microsystems (Series) ; v. 23.
Subjects:	Microelectromechanical systems. Mechatronics.