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|a TK7874
|b .E4817 1987
|
| 245 |
0 |
0 |
|a Electron-beam, x-ray, and ion-beam lithographies VI
|h [electronic resource] :
|b [proceedings] 5-6 March 1987, Santa Clara, California /
|c Phillip D. Blais, chair/editor ; sponsored by SPIE--the International Society for Optical Engineering.
|
| 260 |
|
|
|a Bellingham, Wash., USA :
|b The Society,
|c ©1987.
|
| 300 |
|
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|a 1 online resource (vi, 265 pages) :
|b illustrations.
|
| 336 |
|
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|a text
|b txt
|2 rdacontent.
|
| 337 |
|
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|a computer
|b c
|2 rdamedia.
|
| 338 |
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|a online resource
|b cr
|2 rdacarrier.
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| 490 |
1 |
|
|a Proceedings of SPIE--the International Society for Optical Engineering,
|v v. 773.
|
| 504 |
|
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|a Includes bibliographical references and index.
|
| 588 |
0 |
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|a Print version record.
|
| 650 |
|
0 |
|a Lithography, Electron beam
|v Congresses.
|0 http://id.loc.gov/authorities/subjects/sh2009130002.
|
| 650 |
|
0 |
|a X-ray lithography
|v Congresses.
|0 http://id.loc.gov/authorities/subjects/sh2008114009.
|
| 650 |
|
0 |
|a Ion beam lithography
|v Congresses.
|
| 650 |
|
7 |
|a Ion beam lithography.
|2 fast
|0 (OCoLC)fst00978566.
|
| 650 |
|
7 |
|a Lithography, Electron beam.
|2 fast
|0 (OCoLC)fst01000292.
|
| 650 |
|
7 |
|a X-ray lithography.
|2 fast
|0 (OCoLC)fst01181834.
|
| 655 |
|
7 |
|a Conference papers and proceedings.
|2 fast
|0 (OCoLC)fst01423772.
|
| 700 |
1 |
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|a Blais, Phillip D.
|0 http://id.loc.gov/authorities/names/n82122793
|1 http://isni.org/isni/0000000023494905.
|
| 710 |
2 |
|
|a Society of Photo-Optical Instrumentation Engineers.
|0 http://id.loc.gov/authorities/names/n78088934
|1 http://isni.org/isni/0000000122965856.
|
| 776 |
0 |
8 |
|i Print version:
|t Electron-beam, x-ray, and ion-beam lithographies VI.
|d Bellingham, Wash., USA : The Society, ©1987
|w (DLC) 87060741
|w (OCoLC)16350397.
|
| 856 |
4 |
0 |
|u https://colorado.idm.oclc.org/login?url=http://proceedings.spiedigitallibrary.org/volume.aspx?volume=0773
|z Full Text (via SPIE Digital Library)
|
| 830 |
|
0 |
|a Proceedings of SPIE--the International Society for Optical Engineering ;
|v v. 773.
|0 http://id.loc.gov/authorities/names/n42030541.
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