X-ray lithography and applications of soft x-rays to technology [electronic resource] : October 19-20, 1983, Upton, New York / Alan D. Wilson, chairman/editor ; cosponsors, National Synchrotron Light Source/Brookhaven National Laboratory, SPIE--the International Society for Optical Engineering.
Saved in:
| Online Access: |
Full Text (via SPIE Digital Library) |
|---|---|
| Corporate Authors: | , |
| Other Authors: | |
| Format: | Electronic eBook |
| Language: | English |
| Published: |
Bellingham, Wash., USA :
SPIE,
1983.
|
| Series: | Proceedings of SPIE--the International Society for Optical Engineering ;
v. 448. |
| Subjects: |
Search Result 1