Sputtering by Particle Bombardment I : Physical Sputtering of Single-Element Solids / by R. Behrisch.
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| Online Access: |
Full Text (via Springer) |
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| Main Author: | |
| Format: | eBook |
| Language: | English |
| Published: |
Berlin, Heidelberg :
Springer Berlin Heidelberg,
1981.
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| Series: | Topics in applied physics ;
47. |
| Subjects: |
| Physical Description: | 1 online resource. |
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| ISBN: | 9783540385141 3540385142 |
| ISSN: | 0303-4216 ; |