Electron beam testing technology / edited by John T. L. Thong.
This is the first comprehensive volume on electron beam testing for integrated circuits. Including introductory material, a guide to fundamentals, and an implementational section, the work will serve as a complete reference for both experienced practitioners as well as those unfamiliar with the tech...
Saved in:
| Online Access: |
Full Text (via Springer) |
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| Other Authors: | |
| Format: | eBook |
| Language: | English |
| Published: |
New York :
Springer Science+Business Media,
[1993]
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| Series: | Microdevices.
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| Subjects: |
| Summary: | This is the first comprehensive volume on electron beam testing for integrated circuits. Including introductory material, a guide to fundamentals, and an implementational section, the work will serve as a complete reference for both experienced practitioners as well as those unfamiliar with the technology. |
|---|---|
| Physical Description: | 1 online resource. |
| Bibliography: | Includes bibliographical references and index. |
| ISBN: | 9781489915221 1489915222 |
| Source of Description, Etc. Note: | Description based on online resource; title from digital title page (viewed on October 26, 2018) |