Electron beam testing technology / edited by John T. L. Thong.
This is the first comprehensive volume on electron beam testing for integrated circuits. Including introductory material, a guide to fundamentals, and an implementational section, the work will serve as a complete reference for both experienced practitioners as well as those unfamiliar with the tech...
Saved in:
| Online Access: |
Full Text (via Springer) |
|---|---|
| Other Authors: | |
| Format: | eBook |
| Language: | English |
| Published: |
New York :
Springer Science+Business Media,
[1993]
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| Series: | Microdevices.
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| Subjects: |
MARC
| LEADER | 00000cam a2200000xi 4500 | ||
|---|---|---|---|
| 001 | b8016138 | ||
| 006 | m o d | ||
| 007 | cr ||||||||||| | ||
| 008 | 130608s1993 nyu obd 001 0 eng d | ||
| 005 | 20240418150258.8 | ||
| 019 | |a 934977486 | ||
| 020 | |a 9781489915221 |q electronic book | ||
| 020 | |a 1489915222 |q electronic book | ||
| 020 | |z 9781489915245 |q print | ||
| 020 | |z 1489915249 |q print | ||
| 024 | 7 | |a 10.1007/978-1-4899-1522-1 | |
| 035 | |a (OCoLC)spr859587135 | ||
| 035 | |a (OCoLC)859587135 |z (OCoLC)934977486 | ||
| 037 | |a spr10.1007/978-1-4899-1522-1 | ||
| 040 | |a NUI |b eng |e rda |e pn |c NUI |d GW5XE |d OCLCF |d UA@ |d COO |d OCLCQ |d EBLCP |d OCLCQ |d UAB |d OCLCQ |d YDX | ||
| 049 | |a GWRE | ||
| 050 | 4 | |a TK7874.58 |b .E44 1993 | |
| 245 | 0 | 0 | |a Electron beam testing technology / |c edited by John T. L. Thong. |
| 264 | 1 | |a New York : |b Springer Science+Business Media, |c [1993] | |
| 300 | |a 1 online resource. | ||
| 336 | |a text |b txt |2 rdacontent. | ||
| 337 | |a computer |b c |2 rdamedia. | ||
| 338 | |a online resource |b cr |2 rdacarrier. | ||
| 490 | 1 | |a Microdevices, physics and fabrication technologies. | |
| 504 | |a Includes bibliographical references and index. | ||
| 505 | 0 | |a Background to Electron Beam Testing Technology -- I -- 1. Introduction -- 2. Principles and Applications -- II -- 3. Essential Electron Optics -- 4. Electron Beam Interaction with Specimen -- 5. Electron Spectrometers and Voltage Measurements -- 6. High-Speed Techniques -- 7. Picosecond Photoemission Probing -- 8. Signal and Image Processing -- III -- 9. System Integration -- 10. Practical Considerations in Electron Beam Testing -- 11. Industrial Case Studies. | |
| 520 | |a This is the first comprehensive volume on electron beam testing for integrated circuits. Including introductory material, a guide to fundamentals, and an implementational section, the work will serve as a complete reference for both experienced practitioners as well as those unfamiliar with the technology. | ||
| 588 | |a Description based on online resource; title from digital title page (viewed on October 26, 2018) | ||
| 650 | 0 | |a Lithography, Electron beam. |0 http://id.loc.gov/authorities/subjects/sh85077608. | |
| 650 | 0 | |a Computer engineering. |0 http://id.loc.gov/authorities/subjects/sh85029495. | |
| 650 | 0 | |a Optical materials. |0 http://id.loc.gov/authorities/subjects/sh85095155. | |
| 650 | 0 | |a Crystallography. |0 http://id.loc.gov/authorities/subjects/sh85034498. | |
| 650 | 7 | |a Computer engineering. |2 fast |0 (OCoLC)fst00872078. | |
| 650 | 7 | |a Crystallography. |2 fast |0 (OCoLC)fst00884652. | |
| 650 | 7 | |a Optical materials. |2 fast |0 (OCoLC)fst01046768. | |
| 650 | 7 | |a Physics. |2 fast |0 (OCoLC)fst01063025. | |
| 700 | 1 | |a Thong, John T. L., |e editor. |0 http://id.loc.gov/authorities/names/n93013805 |1 http://isni.org/isni/0000000045255622. | |
| 776 | 0 | 8 | |i Print version: |z 9781489915245. |
| 830 | 0 | |a Microdevices. |0 http://id.loc.gov/authorities/names/n86738093. | |
| 856 | 4 | 0 | |u https://colorado.idm.oclc.org/login?url=http://link.springer.com/10.1007/978-1-4899-1522-1 |z Full Text (via Springer) |
| 907 | |a .b80161388 |b 10-01-20 |c 06-02-15 | ||
| 998 | |a web |b 09-30-20 |c b |d b |e - |f eng |g nyu |h 0 |i 1 | ||
| 907 | |a .b80161388 |b 10-01-20 |c 06-02-15 | ||
| 944 | |a MARS - RDA ENRICHED | ||
| 956 | |a Physics & Astronomy | ||
| 915 | |a I | ||
| 956 | |a Springer e-books: Archive | ||
| 956 | |a Springer e-books | ||
| 956 | |b Springer Nature - Springer Book Archive - Springer Physics and Astronomy | ||
| 999 | f | f | |i 8cd89263-634e-596b-84b0-97cc291644a8 |s 86b8b051-420a-5618-b249-84297eded163 |
| 952 | f | f | |p Can circulate |a University of Colorado Boulder |b Online |c Online |d Online |e TK7874.58 .E44 1993 |h Library of Congress classification |i Ebooks, Prospector |n 1 |