Electron beam testing technology / edited by John T. L. Thong.

This is the first comprehensive volume on electron beam testing for integrated circuits. Including introductory material, a guide to fundamentals, and an implementational section, the work will serve as a complete reference for both experienced practitioners as well as those unfamiliar with the tech...

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Bibliographic Details

Online Access:	Full Text (via Springer)
Other Authors:	Thong, John T. L. (Editor)
Format:	eBook
Language:	English
Published:	New York : Springer Science+Business Media, [1993]
Series:	Microdevices.
Subjects:	Lithography, Electron beam. Computer engineering. Optical materials. Crystallography. Physics.