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Electron beam testing technology / edited by John T. L. Thong.

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This is the first comprehensive volume on electron beam testing for integrated circuits. Including introductory material, a guide to fundamentals, and an implementational section, the work will serve as a complete reference for both experienced practitioners as well as those unfamiliar with the tech...

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Bibliographic Details
Online Access: Full Text (via Springer)
Other Authors: Thong, John T. L. (Editor)
Format: eBook
Language:English
Published: New York : Springer Science+Business Media, [1993]
Series:Microdevices.
Subjects:
Lithography, Electron beam.
Computer engineering.
Optical materials.
Crystallography.
Physics.
Table of Contents:
  • Background to Electron Beam Testing Technology
  • I
  • 1. Introduction
  • 2. Principles and Applications
  • II
  • 3. Essential Electron Optics
  • 4. Electron Beam Interaction with Specimen
  • 5. Electron Spectrometers and Voltage Measurements
  • 6. High-Speed Techniques
  • 7. Picosecond Photoemission Probing
  • 8. Signal and Image Processing
  • III
  • 9. System Integration
  • 10. Practical Considerations in Electron Beam Testing
  • 11. Industrial Case Studies.

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