Developments in surface contamination and cleaning [electronic resource] / edited by Rajiv Kohli and Kashmiri L. Mittal.
Rajiv Kohli and Kash Mittal have brought together the work of experts from different industry sectors and backgrounds to provide a state-of-the-art survey and best practice guidance for scientists and engineers engaged in surface cleaning or handling the consequences of surface contamination. Topics...
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| Online Access: |
Full Text (via ScienceDirect) |
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| Other Authors: | , |
| Format: | Electronic eBook |
| Language: | English |
| Published: |
Norwich, NY, U.S.A. :
W. Andrew Pub.,
©2008-
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| Subjects: |
Table of Contents:
- Particle Deposition onto Enclosure Surfaces; Contamination Control: A Systems Approach; Particles in Semiconductor Processing; Continuous Contamination Monitoring Systems; Strippable Coatings for Removal of Surface Contaminants; Ultrasonic Cleaning.
- [v. 1.] Fundamentals and applied aspects
- v. 2. Particle deposition, control and removal.