Reliability of MEMS / edited by Osamu Tabata and Toshiyuki Tsuchiya.

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Bibliographic Details
Online Access: Full Text (via ProQuest)
Other Authors: Tsuchiya, Toshiyuki, Tabata, Osamu, 1956-
Format: eBook
Language:English
Published: Weinheim : Wiley-VCH, ©2008.
Series:Advanced micro & nanosystems ; v. 6.
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Call Number: TK7875 .R437 2008eb
TK7875 .R437 2008eb Available