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Characterization and metrology for ULSI technology [electronic resource] : 1998 international conference, Gaithersburg, Maryland, March 1998 / editors, David G. Seiler [and others]

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Bibliographic Details
Online Access:	Full Text (via Scitation)
Corporate Author:	International Conference on Characterization and Metrology for ULSI Technology Gaithersburg, Md.
Other Authors:	Seiler, David G.
Format:	Electronic Conference Proceeding eBook
Language:	English
Published:	Woodbury, NY : American Institute of Physics, ©1998.
Series:	AIP conference proceedings ; no. 449.
Subjects:	Integrated circuits > Ultra large scale integration > Congresses. Integrated circuits > Ultra large scale integration > Congresses > Software. Integrated circuits > Ultra large scale integration. Conference papers and proceedings.

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Call Number:	TK7874.76 .C49 1998
TK7874.76 .C49 1998	Available