MEMS mechanical sensors / Stephen Beeby [and others].

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Bibliographic Details
Online Access:	Full Text (via IEEE)
Other Authors:	Beeby, Stephen
Format:	eBook
Language:	English
Published:	Boston : Artech House, ©2004.
Series:	Microelectromechanical systems series.
Subjects:	Microelectromechanical systems. Detectors. Detectors Microelectromechanical systems

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Call Number:	TK7875 .M4537 2004eb
TK7875 .M4537 2004eb	Available