Introduction to microelectromechanical systems engineering / Nadim Maluf, Kirt Williams.
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| Online Access: |
Full Text (via IEEE) |
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| Format: | eBook |
| Language: | English |
| Published: |
Boston :
Artech House,
©2004.
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| Edition: | 2nd ed. |
| Series: | Microelectromechanical systems series.
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| Subjects: |
Internet
Full Text (via IEEE)Online
| Call Number: |
TK7875 .M35 2004eb
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| TK7875 .M35 2004eb | Available |