Mems and microsystems : design, manufacture, and nanoscale engineering / Tai-Ran Hsu.
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Main Author: | |
Format: | eBook |
Language: | English |
Published: |
Hoboken, N.J. :
John Wiley,
©2008.
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Edition: | 2nd ed. |
Subjects: |
Internet
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Call Number: |
TK7874 .H794 2008eb
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TK7874 .H794 2008eb | Available |