Mems and microsystems : design, manufacture, and nanoscale engineering / Tai-Ran Hsu.

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Bibliographic Details
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Main Author: Hsu, Tai-Ran
Format: eBook
Language:English
Published: Hoboken, N.J. : John Wiley, ©2008.
Edition:2nd ed.
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Call Number: TK7874 .H794 2008eb
TK7874 .H794 2008eb Available