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    MOEMS : micro-opto-electro-mechanical systems /

    Published 2005
    “…TK7875 .M56 2005…”
    Full Text (via SPIE Digital Library)
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  2. 2
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    MOEMS : micro-opto-electro-mechanical systems /

    Published 2005
    “…TK7875 .M56 2005…”
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