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  1. 1
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    Field guide to optical lithography by Mack, Chris A.

    Published 2006
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  2. 2
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    Optical imaging in projection microlithography by Wong, Alfred Kwok-Kit

    Published 2005
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  3. 3
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    Resolution enhancement techniques in optical lithography by Wong, Alfred Kwok-Kit

    Published 2001
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  4. 4
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    Handbook of microlithography, micromachining, and microfabrication.

    Published 1997
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  5. 5
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    Principles of lithography / by Levinson, Harry J.

    Published 2019
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  6. 6
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    Materials issues and modeling for device nanofabrication : November 29-December 2, 1999 /

    Published 2000
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  7. 7
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    ASML's architects / by Raaijmakers, René

    Published 2019
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  8. 8
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    Optical/laser microlithography.

    Published 1988
    Optical/Laser Microlithography -- SPIE Digital Library - Conference Proceedings
    Journal

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  9. 9
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    Handbook of microlithography, micromachining, and microfabrication

    Published 1997
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  10. 10
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    20th Annual BACUS Symposium on Photomask Technology 13-15 September, 2000, Monterey, [California] USA /

    Published 2001
    Full Text (via SPIE Digital Library)
    Electronic Conference Proceeding eBook

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  11. 11
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    Microcircuit Engineering 88 : proceedings of the International Conference on Microlithography, September 20-22, 1988, Vienna, Austria /

    Published 1989
    Conference Proceeding Book

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  12. 12
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    Challenges in process integration and device technology : 18-19 September 2000, Santa Clara, USA /

    Published 2000
    Book

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  13. 13
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    Lithography process control by Levinson, Harry J.

    Published 1999
    Full Text (via Knovel)
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  14. 14
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    26th European Mask and Lithography Conference 18-20 January 2010, Grenoble, France /

    Published 2010
    Full Text (via SPIE Digital Library)
    Electronic Conference Proceeding eBook

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  15. 15
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    Photomask and next-generation lithography mask technology XVII 13-15 April 2010, Yokohama, Japan /

    Published 2010
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  16. 16
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    Photomask technology 2010 13-16 September 2010, Monterey, California, United States /

    Published 2010
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  17. 17
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    Optical microlithography.

    Published 1982
    Serial

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  18. 18
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    Optical microlithography XIII 1-3 March, 2000, Santa Clara, [California], USA /

    Published 2000
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  19. 19
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    Emerging lithographic technologies IV 28 February-1 March, 2000, Santa Clara, [California], USA /

    Published 2000
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  20. 20
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    Challenges in process integration and device technology 18-19 September 2000, Santa Clara, USA /

    Published 2000
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    Electronic eBook

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